This softcover edition of the eponymous volume from the successful "Advanced Micro & Nanosystems" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation. It examines the various routes and meth This softcover edition of the eponymous volume from the successful "Advanced Micro & Nanosystems" series covers all aspects of fabrication of MEMS under CMOS-compatible conditions from design to implementation. It examines the various routes and methods to combine electronics generated by the CMOS technology with novel micromechanical parts into one-chip solutions. Various approaches, fundamental and technological aspects as well as strategies leading to different types of functionalities and presented in detail. For the practicing engineer as well as MSc and PhD students on MEMS courses. ...Continua Nascondi
