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Run-to-run control in semiconductor manufacturing

By James Moyne

Others | 9780849311789

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Book Description

This book overcomes that barrier by offering in-depth analyses of R2R control, and is a must-read for technical managers, process and quality engineers, and ...

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Book Details

  • English Books
  • Others 348 Pages
  • ISBN-10: 0849311780
  • ISBN-13: 9780849311789
  • Publisher: CRC
  • Pub date: Jan 01, 2001
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9780849311789 Others $144.95 $144.44 The Book Depository
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